Collaborative Research Center 516
Design and Manufacturing of Active Micro Systems
October 11th/12th, 2011
Two day „Kolloquium Mikroproduktion“ (Colloquium Microproduction) will serve as a closing event for SFB 499 together with SFB 747 and Forschergruppe 702, as well as with the already completed SFB 440 and 516.
In the beginning of 2011, SFB 516’s closure book will be published.
Title: Design and Manufacturing of Active Microsystems
Series: Microtechnology and MEMS
Editors: Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
Presentations in connection with programme for the evening
There is a closing event in Braunschweig, due to the expiring encouragement of SFB 516. Some presentations at the IHK Braunschweig are followed by a programme for the evening at the "Altstadtrathaus".
Former news from SFB 516 can be seen in the archive (available only in German).